Airborne Molecular Contamination Control and the Effect of Filter Media Technical Parameters
Link ID 123556
Title Airborne Molecular Contamination Control and the Effect of Filter Media Technical Parameters
Url http://www.bbafiltration.com/pdf/Cleanrooms_East_2000_paper.pdf
Description Technical paper reviewing the SEMI F21-95 classification system for filtration, and providing an explanation of the differences between adsorption and chemisorption in relation to filter media. Author: Matthew C. Middlebrooks.
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Date Jul 19, 2006
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