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Other links at Electronics and Electrical > Components > Semiconductors > Tools and Equipment |
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Special Purpose Machines
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Specializes in custom and special-purpose machines for wafer and small-product handling applications.
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PVA TePla AG
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Providers of microwave plasma tools for ashing, resist strip, descum, polyimide and paralyne removal, surface cleaning and isotropic etch processing for semiconductor wafers, flat panel displays , mems and optoelectronics.
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Heidelberg Instruments
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Manufactures direct write laser lithography systems. Applications include photomask, MEMS, BioMEMS, grey exposure and exposure through thick resist.
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